MFCP902 series mass flow controller adopts the principle of differential pressure mass measurement, and can simultaneously display and output: instantaneous flow, cumulative flow, pressure, temperature, etc.. It contains an internal control valve for direct flow control. Unlike thermal flow meters, there is no additional “specific heat capacity” error when using gas conversion factors. Even if the measurement gas is different from the factory calibration gas, the measurement accuracy will not be affected. No preheating is required, resulting in faster response time and higher accuracy. The whole series adopts newly designed digital measurement and control circuits, digital IO with a variety of optional communication protocols, compatible with analog communication, optional with LCD version, on-site convenient operation display.
Product features
■ Instantaneous flow, cumulative flow, pressure and temperature are displayed at the same time
■ Fast response, high precision
■ Tubular shunt, not easy to be blocked
■ No need to preheat, no difference in specific heat capacity
■ Applicable to a variety of low-pressure and high-pressure pipelines
■ Multiple parameters output simultaneously
Applications
■ Glass industry and solar energy
■ Atmospheric monitoring and environmental protection
■ Industrial production and petroleum and petrochemical
■ Coal analysis
■ Gas production and distribution
■ Various instrumental analysis
■ Semiconductor industry
Performance indicators
■ Range: 30SLM~300SLM (N2 standard)
Note: SCCM (standard milliliters per minute) SLM (standard liters per minute) Standard conditions (0 ℃, 101.3Kpa)
■ Flow Accuracy: ± 0.5% F.S
■ Measurement and control range: range ratio of 100:1
■ Repeatability: ± 0.2% F.S
■ Linearity: ± 0.5% F.S
■ Control range: 1% ~ 100%F.S
■ Response time: <0.1s
■ Maximum withstand pressure: 3MPa/10MPa
■ Temperature coefficient: ±0.015%F.S/°C
■ Leakage rate: 1×10-9Pa m³/S
■ Operating temperature: 0～50℃
■ Working pressure: <10kPa
■ Warm-up time: 5 min accuracy to ±2% F.S (30 min to reach the best accuracy)
Electrical parameters
■ Power supply: ± 15VDC, 24VDC
■ Analog output: 0 ~ 5V, 4 ~ 20mA, 1 ~ 5V
■ Digital communication: RS232, RS485, MODBUS protocol
■ Electrical interface: DB15 hole
■ Maximum power consumption: 10W (MFC); 3W (MFM)
Mechanical parameters
■ Valve type: normally closed valve
■ Base material: 316L stainless steel
■ Seal material: Viton, neoprene, nitrile rubber
■ Pneumatic interface: 1/8, 1/4, 3/8, φ3, φ6, φ9 ferrule or VCR
Supporting equipment
■ Mass Flow Measurement and Control System Software Version V2.0
