MFP100L SERIES
MFP100L Small Flow Mass Flow Meter
MFP100L Small Flow Mass Flow Meter is designed for precise gas flow measurement from 2 SCCM to 30 SLM. Utilizing differential pressure mass flow technology, it simultaneously measures flow rate, pressure and temperature while providing fast response, excellent repeatability and stable performance for laboratory, analytical and industrial gas applications.
Flow Accuracy
±1% FS
Flow Range
0–2 SCCM / 0–30 SLM
Output
1–5 V / 4–20 mA / More Options
Technical Specifications
FLOW PERFORMANCE
Flow Range
0–30 SLM / 0–2 SCCM
Flow Accuracy
±1% FS
ELECTRICAL & COMMUNICATION
Output
4–20 mA / RS485 / 1–5 V
Power Supply
±15VDC / 24VDC
Product Overview
MFP100L Small Flow Mass Flow Meter delivers highly accurate gas flow measurement for low-flow applications. Based on differential pressure mass flow technology, it eliminates gas conversion errors commonly associated with thermal mass flow meters and maintains excellent accuracy across different gases without recalibration.
The instrument simultaneously displays flow rate, totalized flow, pressure and temperature, providing fast response, outstanding repeatability and flexible communication interfaces for laboratory instrumentation, semiconductor equipment and industrial process control.
Technical Specifications
Flow Performance
- Flow Range
- Accuracy
- Repeatability
- Linearity
- Response Time
Operating Conditions
- Operating Temperature
- Working Pressure
- Maximum Pressure
- Warm-up Time
Electrical
- Power Supply
- Analog Output
- Digital Communication
- Electrical Connector
Mechanical
- Wetted Material
- Seal Material
- Process Connections
Display
- LCD Display (Optional)
Communication
- RS232
- RS485
- Modbus RTU
| Item | Value |
|---|---|
| Flow Range | 2 SCCM – 30 SLM |
| Accuracy | ±0.5% F.S. |
| Repeatability | ±0.2% F.S. |
| Response Time | <0.1 s |
| Communication | RS232 / RS485 / Modbus |
Key Features
- Small Flow Measurement from 2 SCCM to 30 SLM
- Differential Pressure Mass Flow Technology
- Simultaneous Flow, Pressure & Temperature Display
- No Gas Conversion Errors
- Fast Response (<0.1 s)
- High Repeatability
- Digital & Analog Communication
- LCD Display Available
- Compact Industrial Design
- Low Maintenance Operation
Typical Applications
- Semiconductor Manufacturing
- Analytical Instruments
- Laboratory Gas Systems
- Environmental Monitoring
- Glass Manufacturing
- Solar Cell Production
- Industrial Gas Supply
- Process Automation
- Petrochemical Industry
- Research Laboratories
Custom Manufacturing
When the conventional products can not meet your needs, we can provide you with customized services according to the technical parameters.
