MFCP901 SERIES

MFCP901 Small Flow Mass Flow Controller

MFCP901 Small Flow Mass Flow Controller combines differential pressure sensing with high-speed digital control to deliver accurate gas flow measurement and stable closed-loop flow regulation. Designed for laboratory, semiconductor, environmental monitoring and industrial gas applications, it supports multiple communication interfaces for seamless automation integration.

Flow Accuracy ±0.5% FS

Flow Range 0–2 SCCM / 0–30 SLM

Gas Type Natural Gas

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Technical Specifications

FLOW PERFORMANCE

Flow Range

0–30 SLM / 0–2 SCCM

Flow Accuracy

±0.5% FS

Gas Type

Natural Gas

ELECTRICAL & COMMUNICATION

Output

4–20 mA / 0–10 V / 0–5 V / 1–5 V

Power Supply

±15VDC / 24VDC

Product Overview

MFCP901 Series Mass Flow Controller adopts differential pressure mass flow measurement technology to provide accurate gas flow measurement and closed-loop flow control. The controller simultaneously measures instantaneous flow, totalized flow, pressure and temperature, delivering stable performance across a wide operating range.

Unlike conventional thermal mass flow controllers, the MFCP901 series minimizes gas conversion errors and does not require preheating, ensuring fast response and reliable accuracy. Multiple communication interfaces and analog outputs make it suitable for integration into industrial automation and gas control systems.

Key Features

Simultaneous display of flow, pressure, temperature and totalized flow
Fast response with high measurement accuracy
Differential pressure measurement without gas conversion errors
No warm-up required for stable performance
Suitable for low-pressure and high-pressure gas systems
Multiple analog and digital communication options

Typical Applications

Semiconductor Manufacturing
Industrial Gas Distribution
Environmental Monitoring
Petrochemical Industry
Glass & Solar Industry
Laboratory Gas Control
Instrumentation & Analytical Equipment

Technical Highlights

Flow Performance

Parameter	Specification
Flow Range	2 SCCM–30 SLM (N₂ Standard)
Accuracy	±0.5% F.S.
Repeatability	±0.2% F.S.
Linearity	±0.5% F.S.
Control Range	1–100% F.S.
Response Time	<0.1 s
Maximum Pressure	3 MPa / 10 MPa
Operating Temperature	0–50°C
Leakage Rate	1×10⁻⁹ Pa·m³/s
Warm-up Time	5 min (±2% F.S.), 30 min for best accuracy

Mechanical Specifications

Parameter	Specification
Valve Type	Normally Closed
Wetted Material	316L Stainless Steel
Seal Material	Viton / Neoprene / Nitrile
Process Connections	1/8″, 1/4″, 3/8″, Φ3, Φ6, Φ9 Ferrule or VCR