MFCP902 SERIES

MFCP902 Mass Flow Controller

MFCP902 Large Flow Mass Flow Controller provides precise gas flow measurement and automatic flow control from 30 to 300 SLM. Using differential pressure technology, it delivers fast response, excellent repeatability and reliable digital communication for industrial gas systems, OEM equipment and process automation.

Flow Accuracy ±0.5% FS

Flow Range 0–30 SLM / 0–300 SLM

Gas Type Natural Gas

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Technical Specifications

FLOW PERFORMANCE

Flow Range

0–300 SLM / 0–30 SLM

Flow Accuracy

±0.5% FS

Gas Type

Natural Gas

Control Accuracy

0.5%F.S

FUNCTIONS & DISPLAY

Display

TFT

ELECTRICAL & COMMUNICATION

Output

4–20 mA / 0–10 V / 0–5 V / CAN / 1–5 V

Power Supply

±15VDC / 24VDC

Product Overview

MFCP902 Large Flow Mass Flow Controller is designed for accurate gas flow measurement and closed-loop flow control in medium-flow industrial applications. Based on advanced differential pressure sensing technology, it simultaneously measures flow, pressure and temperature while providing stable automatic control through an integrated proportional valve.

Compared with conventional thermal mass flow controllers, the MFCP902 eliminates gas conversion errors caused by variations in specific heat capacity, ensuring consistent measurement accuracy even when different gases are used. Fast response, high repeatability and flexible communication interfaces make it an ideal solution for industrial automation, gas delivery systems and OEM equipment manufacturers.

Product Features

Simultaneous measurement of flow, pressure and temperature
Integrated proportional valve for precise automatic flow control
Differential pressure measurement without gas conversion errors
Fast response time below 0.1 seconds
High repeatability up to ±0.2% F.S.
Suitable for both low-pressure and high-pressure gas systems
Multiple analog and digital communication options
Stable performance for continuous industrial operation

Applications

Industrial Gas Distribution Systems
Semiconductor Equipment
Environmental Monitoring
Petrochemical Processing
Glass Manufacturing
Solar Cell Production
Laboratory Gas Control
Analytical Instruments
OEM Gas Equipment
Process Automation Systems

Technical Highlights

Flow Performance

Parameter	Specification
Flow Range	30–300 SLM (N₂ Standard)
Accuracy	±0.5% F.S.
Repeatability	±0.2% F.S.
Linearity	±0.5% F.S.
Control Range	1–100% F.S.
Response Time	< 0.1 s
Maximum Working Pressure	3 MPa / 10 MPa
Operating Temperature	0–50°C

Electrical Specifications

Parameter	Specification
Power Supply	±15 VDC / 24 VDC
Analog Output	0–5 V, 1–5 V, 4–20 mA
Digital Communication	RS232, RS485, MODBUS RTU
Electrical Connector	DB15

Mechanical Specifications

Parameter	Specification
Valve Type	Normally Closed Proportional Valve
Wetted Material	316L Stainless Steel
Seal Material	Viton / Neoprene / Nitrile
Process Connections	1/8″, 1/4″, 3/8″, Φ3, Φ6, Φ9 Ferrule or VCR